American Journal of Nano Research and Applications

Volume 9, Issue 4, December 2021

  • Investigation on the Electronic Structure of Nanosized Barium Monosilicide Films Produced by Low-energy Implantation of Ba+ Ions in Si

    Gunel Imanova, Ilkhom Bekpulatov

    Issue: Volume 9, Issue 4, December 2021
    Pages: 32-35
    Received: 14 February 2022
    Accepted: 2 March 2022
    Published: 9 March 2022
    Abstract: The processes of formation of nanoscale silicide films during the implantation of Ba+ ions into Si (111) and Si (100) and subsequent thermal annealing were studied by electron spectroscopy. It is shown that implantation of ions with a high dose D > 1016 cm-2 and short-term heating leads to the formation of thin films of barium monosilicide with new... Show More