The 2-D semiconductors have been recognised as promising channel materials for the ultimately scaled transistors tech-nologies beyond silicon. An essential technology enable for 2-D semiconductors electronics is the development of die-lectric materials interfaced with 2-D semiconductors. In this review articles, we overview different types of dielectric materials that are suitable for different applications scenarios, including high-K gate dielectric, low-K space and thermal management materials under the paradigm of 2-D semiconductors electronics. Material selection guidelines for dielectric materials and the key process technology modules are discussed in detail. The state of the art device technologies are sumrised, and the remaining challenges towards practical application are discussed from the industrial perspective.

Semiconductors, Dielectric, Thermal Management, Gates