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A Practical Electrode for Microwave Plasma Processes

Received: 10 April 2013     Published: 2 May 2013
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Abstract

In-liquid plasma chemical vapor deposition (CVD) method is useful for high speed production of high quality diamond films. The method is simple and secure comparing usual CVD methods. In this paper, new electrodes for in-liquid plasma CVD by receiving microwaves are developed and introduced. This paper examines the fabrication of electrodes that enable the generation of plasma by effectively receiving microwaves. The fabricated electrodes are used to generate plasma in a waste liquid and the performance of the electrode is evaluated by the speed at which gases are created by decomposing the liquid. By using experiments in decomposing n-dodecane using in-liquid plasma and through detailed investigation into the length of the electrode used, it is confirmed that the half wavelength is optimal for the generation of plasma. The fabri-cated electrodes are used to test the formation of diamond film by plasma CVD in the microwave oven. Diamond film is successfully created inside microwave oven by using the vapor from a mixture of methanol and ethanol.

Published in International Journal of Materials Science and Applications (Volume 2, Issue 3)
DOI 10.11648/j.ijmsa.20130203.12
Page(s) 83-88
Creative Commons

This is an Open Access article, distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution and reproduction in any medium or format, provided the original work is properly cited.

Copyright

Copyright © The Author(s), 2013. Published by Science Publishing Group

Keywords

In-Liquid Plasma, Electrode, Microwave, Plasma CVD

References
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[13] A. Chayahara, Y. Mokuno, Y. Horino, Y. Takasu, H. Kato, H. Yoshikawa, N. Fujimori, "The effect of nitrogen addition during high-rate homoepitaxial growth of diamond by microwave plasma CVD," Diamond Relat. Mater., vol. 13, pp. 1954-1958, September 2004.
[14] T. Teraji, M. Hamada, H. Wada, M. Yamamoto, K. Arima, T. Ito, "High rate growth and electrical/optical properties of high-quality homoepitaxial diamond (100) films," Diamond Relat. Mater., vol. 14, pp. 255-260, January 2005.
[15] X. Li, J. Perkins, R. Collazo, R. J. Nemanich, Z. Sitar, "Investigation of the effect of the total pressure and methane concentration on the growth rate and quality of diamond thin films grown by MPCVD," Diamond Relat. Mater., vol. 15, pp. 1784-1788, November 2006.
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  • APA Style

    Hiromichi Toyota, Shinfuku Nomura, Shinobu Mukasa. (2013). A Practical Electrode for Microwave Plasma Processes. International Journal of Materials Science and Applications, 2(3), 83-88. https://doi.org/10.11648/j.ijmsa.20130203.12

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    ACS Style

    Hiromichi Toyota; Shinfuku Nomura; Shinobu Mukasa. A Practical Electrode for Microwave Plasma Processes. Int. J. Mater. Sci. Appl. 2013, 2(3), 83-88. doi: 10.11648/j.ijmsa.20130203.12

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    AMA Style

    Hiromichi Toyota, Shinfuku Nomura, Shinobu Mukasa. A Practical Electrode for Microwave Plasma Processes. Int J Mater Sci Appl. 2013;2(3):83-88. doi: 10.11648/j.ijmsa.20130203.12

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  • @article{10.11648/j.ijmsa.20130203.12,
      author = {Hiromichi Toyota and Shinfuku Nomura and Shinobu Mukasa},
      title = {A Practical Electrode for Microwave Plasma Processes},
      journal = {International Journal of Materials Science and Applications},
      volume = {2},
      number = {3},
      pages = {83-88},
      doi = {10.11648/j.ijmsa.20130203.12},
      url = {https://doi.org/10.11648/j.ijmsa.20130203.12},
      eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.ijmsa.20130203.12},
      abstract = {In-liquid plasma chemical vapor deposition (CVD) method is useful for high speed production of high quality diamond films. The method is simple and secure comparing usual CVD methods. In this paper, new electrodes for in-liquid plasma CVD by receiving microwaves are developed and introduced. This paper examines the fabrication of electrodes that enable the generation of plasma by effectively receiving microwaves. The fabricated electrodes are used to generate plasma in a waste liquid and the performance of the electrode is evaluated by the speed at which gases are created by decomposing the liquid. By using experiments in decomposing n-dodecane using in-liquid plasma and through detailed investigation into the length of the electrode used, it is confirmed that the half wavelength is optimal for the generation of plasma. The fabri-cated electrodes are used to test the formation of diamond film by plasma CVD in the microwave oven. Diamond film is successfully created inside microwave oven by using the vapor from a mixture of methanol and ethanol.},
     year = {2013}
    }
    

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  • TY  - JOUR
    T1  - A Practical Electrode for Microwave Plasma Processes
    AU  - Hiromichi Toyota
    AU  - Shinfuku Nomura
    AU  - Shinobu Mukasa
    Y1  - 2013/05/02
    PY  - 2013
    N1  - https://doi.org/10.11648/j.ijmsa.20130203.12
    DO  - 10.11648/j.ijmsa.20130203.12
    T2  - International Journal of Materials Science and Applications
    JF  - International Journal of Materials Science and Applications
    JO  - International Journal of Materials Science and Applications
    SP  - 83
    EP  - 88
    PB  - Science Publishing Group
    SN  - 2327-2643
    UR  - https://doi.org/10.11648/j.ijmsa.20130203.12
    AB  - In-liquid plasma chemical vapor deposition (CVD) method is useful for high speed production of high quality diamond films. The method is simple and secure comparing usual CVD methods. In this paper, new electrodes for in-liquid plasma CVD by receiving microwaves are developed and introduced. This paper examines the fabrication of electrodes that enable the generation of plasma by effectively receiving microwaves. The fabricated electrodes are used to generate plasma in a waste liquid and the performance of the electrode is evaluated by the speed at which gases are created by decomposing the liquid. By using experiments in decomposing n-dodecane using in-liquid plasma and through detailed investigation into the length of the electrode used, it is confirmed that the half wavelength is optimal for the generation of plasma. The fabri-cated electrodes are used to test the formation of diamond film by plasma CVD in the microwave oven. Diamond film is successfully created inside microwave oven by using the vapor from a mixture of methanol and ethanol.
    VL  - 2
    IS  - 3
    ER  - 

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Author Information
  • Graduate School of Science and Engineering, Ehime University, 3 Bunkyo-cho, Matsuyama, Ehime 791-8577, Japan

  • Graduate School of Science and Engineering, Ehime University, 3 Bunkyo-cho, Matsuyama, Ehime 791-8577, Japan

  • Graduate School of Science and Engineering, Ehime University, 3 Bunkyo-cho, Matsuyama, Ehime 791-8577, Japan

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